LED Type Wafer Alignment Sensor Controller HD-T1

The use of a safe LED light beam now allows for high precision detection with a resolution of 30 μm 1.181 mil

CE Approved
CE : EMC Directive

No safety measures are required at all

As a safe red LED is used as the light source, there is no need for time-consuming safety measures. The protective covers usually required when using laser beams are not needed, and FDA approval is not required in order to use this sensor in the US.

Easy installation

This unit is equipped with a one-touch connector to connect the sensor head to the controller. The amount of wiring is therefore minimized, resulting in easy maintenance.

Quick wire connection

The HD-T1 series has a maximum current consumption of only 70 mA, for both the sensor head and the controller. The current consumption is almost as low as that of photoelectric sensors.

High resolution of 30 μm 1.181 mil

Although the HD-T1 series uses a red LED for its light source, it has the same high level of performance as laser sensors, thus enabling high precision detection.

No need for beam axis alignment

As both the receiver and the emitter are integrated into a single unit, there is no need to perform any troublesome alignment of the beam axis. In addition, as the HD-T1 series can perform its detection function over a broad area – with both a sensing range and a sensing width of 30 mm 1.181 in, this unit can be utilized for sensing wafers of many different sizes.

Adjustment functions for both span and shift have been incorporated

In addition to the span adjustment function, a convenient shift adjustment function has also been incorporated into the analog output (1 to 5 V). The shift adjustment function allows the analog voltage to be shifted by up to ±0.5 V.