It corresponds to various liquid events, from the contact (wetted) type to the pipe mounting type, and up to leak detection.
Features
Applications
Detecting liquid level in a tank
Leak detection for use in semiconductor device manufacturing
For detecting the upper limit of liquid surface level, sensor that receives beam when “liquid is absent” is recommended.
The sensor will turn OFF during abnormal conditions (excess fluid, fiber disconnection, etc.)!
Liquid absent: Beam received (Output ON)
Liquid present / fiber is cutoff: Beam not received (Output OFF)
FD-FA93
Strong against air bubbles
Applicable pipe: Transparent pipe, Outer diameter ø8 mm ø0.315 in or more
(When used with the tying bands: o8 to ø80 mm ø0.315 to ø3.150 in)
FD-F41
Standard type
FD-F4
For 1 mm 0.039 in thick pipes manufactured by PFA
For detecting the lower limit of liquid surface level, sensor that receives beam when “liquid is present” is recommended.
The sensor will turn OFF during abnormal conditions (insufficient liquid, fiber disconnection, etc.) !
Liquid present: Beam received (Output ON)
Liquid absent / fiber is cutoff: Beam not received (Output OFF)
FT-F93
Thru-beam
Full-protection type [FD-HF40Y / FD-F41Y (Liquid level sensing)]
Small diameter type(ø4 mm ø0.157 in)
Bends easily with its small bending radius, protective tube is cuttable and extendable
* The range of 50 mm 1.969 in from the fiber tip cannot be cut. Also, fiber length can be extended using MS-FX-02Y (optional).
Full-protection type [FD-F71 (Liquid level sensing)]
SEMI S2 compliant
Detect chemical leaks in semiconductor and LCD manufacturing processes.
Compact, space-saving
Side-mountable fiber head as slim as 10 mm 0.394 in is good to use in confined spaces.
Ideal for use with chemicals and volatile materials
This fiber type sensor is safer to use with volatile materials (SEMI S2 compliant). The fluorine resin fiber head makes it ideal for use with chemicals.
* The range of 50 mm 1.969 in from the fiber tip cannot be cut. Also, fiber length can be extended using MS-FX-02Y (optional).
Order guide
Contact type
Oil-resistant
| Type | Shape of fiber head (mm) |
Model No. | Bending radius (mm) |
Fiber cable length | Free-cut | Protection | Ambient temp. |
|
|---|---|---|---|---|---|---|---|---|
| Description | ||||||||
| Liquid level sensing | Heat resistant125℃ Fluorine resin coating Metal-free  |
FD-F8Y | Protective tube R40 Fiber R15 |
2m (Note 1) |
Available | IP68 | -40 to +125℃ |
|
| ø6mm ø0.236 in Protective tube: Fluorine resin, length 1,000 mm 39.370 in (not cuttable) Liquid surface not contacted: Beam received, Liquid surface contacted: Beam not received |
||||||||
| Heat resistant105℃ Fluorine resin coating Metal-free  |
FD-HF40Y (Note 2) |
Protective tube R20 Fiber R10 |
2m | Available | IP68G (Note 3) |
-40 to +105℃ |
||
| ø4mm ø0.157 in Protective tube: Fluorine resin, length 500 mm 19.685 in (cuttable) Liquid surface not contacted: Beam received, Liquid surface contacted: Beam not received |
||||||||
| Liquid leak detection | SEMI S2 compliant (Note 4) W20×H30×D10  |
 FD-F71 |
R4 Bending durability |
5m | Available | IP67 | -20 to +60℃ |
|
| Liquid leak detection Leak absent: Beam received, Leak present: Beam interrupted Compatible amplifire: FX-500 / FX-550 series only |
||||||||
Note1: The allowable cutting range is 1,000 mm 39.370 in from the end that the amplifier inserted.
Note2: Liquid inflow prevention joint, protective tube extension joint, fiber mounting joint is available.
Note3: Protection structure has been changed from production at February, 2014.
Note4: The design takes into account the environmental testing required by SEMI S2.
To ensure that the final system complies with the standards, you must design and use it in accordance with relevant standards, regulations, and regulations.
・ Refer to “Digital Fiber Sensor FX-550/FX-550L List of fibers”, “Digital Fiber Sensor FX-500 Ver.2 List of fibers” and “Digital Fiber Sensor FX-100 List of fibers” for the sensing range.
・ :
Refers to a fiber which possesses both unbreakable (bending radius: R10 mm R0.394 in, reciprocating bending: 180°) and more flexible (bending radius: R4 mm R0.157 in or less) features.
Pipe-mountable type
| Type | Shape of fiber head (mm) |
Model No. | Bending radius (mm) |
Fiber cable length | Free-cut | Protection | Ambient temp. |
|
|---|---|---|---|---|---|---|---|---|
| Description | ||||||||
| Liquid level sensing | Standard W25×H13×D20  |
FD-F41 | R10 | 2m | Available | – | -40 to +100℃ |
|
| Applicable pipe diameter: Outer dia. ø6 to ø26 mm ø0.236 to ø1.024 in transparent pipe [PVC (vinyl chloride), fluorine resin, polycarbonate, acrylic, glass, wall thickness 1 to 3 mm 0.039 to 0.118 in] Liquid absent: Beam received, Liquid present: Beam not received |
||||||||
| For 1 mm thick PFA pipe W25×H13×D20  |
FD-F4 | R10 | 2m | Available | – | -40 to +100℃ |
||
| Applicable pipe diameter：Outer dia. ø6 toø26mm ø0.236 to ø1.024 in transparent pipe [PFA (fluorine resin) or equivalently transparent pipe, wall thickness 1 mm 0.039 in] Liquid absent: Beam received, Liquid present: Beam not received |
||||||||
| Liquid sensing | Mountable on pipe·array fiber W6.5×H28.3×D17  |
FD-FA93 |
R4 Bending durability |
2m | Available | IP40 | -40 to +70℃ |
|
| Applicable pipe diameter：Outer dia. ø8mm ø0.315 in or more transparent pipe (When used with the tying bands: ø8 to ø80 mm ø0.315 to ø3.150 in) [PFA (fluorine resin), including translucent] Liquid absent: Beam received, Liquid present: Beam not received |
||||||||
| SEMI S2 compliant (Note) W23×H20×D17  |
FT-F93 |
Protective tube R20 Fiber R2 Bending durability |
2m | Available | IP40 | -40 to +60℃ |
||
| Applicable pipe diameter：Outer dia. ø3 toø10mm ø0.118 to ø0.394 in transparent pipe [PFA (fluorine resin) or equivalently transparent pipe, wall thickness 0.3 to 1 mm 0.012 to 0.039 in] Liquid absent: Beam not received, Liquid present: Beam received Compatible amplifire: FX-500 / FX-550 series only |
||||||||
Compatible amplifire: FX-500 / FX-550 series only
(Note) : The design takes into account the environmental testing required by SEMI S2.
To ensure that the final system complies with the standards, you must design and use it in accordance with relevant standards, regulations, and regulations.
・ Refer to “Digital Fiber Sensor FX-550/FX-550L List of fibers”, “Digital Fiber Sensor FX-500 Ver.2 List of fibers” and “Digital Fiber Sensor FX-100 List of fibers” for the sensing range.
・ :
Refers to a fiber which possesses both unbreakable (bending radius: R10 mm R0.394 in, reciprocating bending: 180°) and more flexible (bending radius: R4 mm R0.157 in or less) features.
Accessories for additional supply
・ MS-FD-F7-1 (SUS mounting bracket for FD-F71)
・ MS-FD-F7-2 (PVC mounting bracket for FD-F71)
・ MS-FD-F7-1
(SUS mounting bracket for FD-F71)
・ MS-FD-F7-2
(PVC mounting bracket for FD-F71)
Discontinued products [Order accepted till November, 2022]
- Substitute products will not guarantee the specifications of discontinued products.
Please check the specification details from catalog before use.
| Discontinued product | Recommended substitute | ||||
|---|---|---|---|---|---|
| Product number/Part number | Last time buy | Product number/Part number | Product name | Remark | |
| Product number: FD-F41Y Part number: FD-F41Y |
November 30, 2022 To be discontinued |
 |
Product number:
FD-HF40Y Part number: FD-HF40Y
|
Liquid Leak / Liquid Detection Fiber |
–
|